The standard provides a grading system to quantify contamination on solid interfaces. شرکت توسعه کیفیت Particle Range: It covers particles between 0.05 µm and 500 µm Grading System: It defines SCP grades 1 through 8 , where Grade 1 is the cleanest. Applicability:
is a critical international standard that establishes a procedure for assessing surface cleanliness by particle concentration (SCP) within cleanrooms and associated controlled environments . Unlike Part 1 of the series, which focuses on airborne particles, Part 9 provides a framework for measuring and classifying the contamination actually present on solid surfaces, such as walls, floors, equipment, and products. Scope and Applicability
ISO 14644-9 uses a grading system (Grades 1 through 8) to define cleanliness levels. Represents the cleanest surface level. Grade 8: Represents the least stringent cleanliness level. Iso 14644-9 Pdf
[ C_n = 10^N \times (0.1 / d)^2.08 ]
Published by the International Organization for Standardization (ISO), this standard provides a structured framework for defining, measuring, and classifying the level of particles on surfaces within a cleanroom. It is designated under the full title: ISO 14644-9:2012 - Cleanrooms and associated controlled environments — Part 9: Classification of surface cleanliness by particle concentration. The standard provides a grading system to quantify
ISO 14644-9 PDF – Quick Guide to Surface Cleanliness Classification
The standard outlines both and indirect methods for demonstrating conformity. Unlike Part 1 of the series, which focuses
As of 2025, ISO 14644-9 is under systematic review. Potential future amendments include:
As microchips shrink to nanometer scales, a single particle of dust on a silicon wafer can ruin an entire circuit. In semiconductor fabrication plants (fabs), yield loss is the primary cost driver. The classification system found in the helps engineers specify the exact level of surface cleanliness required for lithography equipment and wafer transport containers, directly impacting production yield and profitability.
A surface in a cleanroom—whether it is a workbench, a wall, a piece of equipment, or the product itself—can act as a reservoir for contamination. If a surface is laden with particles, a slight vibration, airflow change, or human interaction can re-launch these particles into the air, compromising the sterile environment. ISO 14644-9 shifts the focus from the invisible (air) to the tangible (surfaces), providing a metric for what is considered "clean enough" for specific processes.
Examining the surface in situ using tools like optical particle counters (OPC), scanning electron microscopy (SEM), or atomic force microscopy (AFM).